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| URL | https://doi.org/10.18429/JACoW-SRF2025-MOP21 |
|---|---|
| Title | Commissioning of chemical vapor deposition system for superconducting thin films |
| Authors |
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| Abstract | Next-generation, thin-film surfaces employing Nb3Sn, NbN, NbTiN, or other compound superconductors are essential for reaching enhanced RF performance levels in SRF cavities. However, optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University developed and commissioned a chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a high-vacuum, gas, and precursor delivery system. Here, we present the commissioned system with the control aspects and safety considerations addressed and the materials we are interested in growing. |
| Paper | download: MOP21.pdf |
| Cite | BibTeX, LaTeX, Text/Word, RIS, EndNote |
| Conference | 22nd International Conference on RF Superconductivity (SRF'25) |
| Series | |
| Location | Tokyo, Japan |
| Date | 18-26 Sep 2025 |
| Publisher | JACoW Publishing, Geneva, Switzerland |
| Editorial Board | Lin Bian (IHEP), Kazuro Furukawa (KEK), Jaeyu Lee (POSTECH), Joele Mira (iThemba LABS), Maurizio Montis (INFN-LNL), Volker R. W. Schaa (GSI), Akihiro Shirakawa (KEK), Akito Uchiyama (Editor-in-Chief, RIKEN) |
| Online ISBN | 978-3-95450-256-1 |
| Online ISSN | 2673-5504 |
| Received | 24 September 2025 |
| Revised | 24 September 2025 |
| Accepted | 24 September 2025 |
| Issued | 08 September 2026 |
| DOI | 10.18429/JACoW-SRF2025-MOP21 |
| Pages | 102-105 |
| Copyright | Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |